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高分辨率顯微鏡載玻片測試板

High Resolution Microscopy Star Target, #37-538

High Resolution Microscopy Star Target, #37-538 High Resolution Microscopy Resolution Target, #37-539 High Resolution Microscope Checker Board, #37-540
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  • 小型圖案尺寸 - 100nm 及 3300 lp/mm
  • 使用高度精準的電子束微影技術組合而成
  • 負片圖案設計

高分辨率顯微鏡載玻片測試板使用高度精準的電子束微影技術設計。圖案蝕刻於 10 × 10mm² 的熔融石英基材,具備廣泛的光譜穿透 (DUV-VIS-NIR) 效果,並於其上方舖設一層高光學密度的鉻。移除鉻層可產生最小 100nm 的圖案。高分辨率顯微鏡載玻片測試板提供優異的尺寸穩定性,安裝於金屬顯微鏡載玻片支撐架。各個測試板的負片圖案,可讓結構變為透明,同時背景則由鉻層遮蔽。

高分辨率顯微鏡 USAF 測試板

高分辨率顯微鏡 USAF 測試板可輕易判定物鏡在穿透光之中的分辨率限制,包含 59 個線條圖案,提供 7.5 至 3300 lp/mm 的水平及垂直對準。本測試板也包含 5 個直徑 4.0-0.25μm 的小孔,可將微成像光學產品詳細特性化。

高分辨率顯微鏡星標測試板

高分辨率顯微鏡星標測試板由 5 個 Siemens 星標組成,顯示星標中心錐形區段精準製造為最小寬度 150nm 的特性。本星標適用於判定孔徑數值非常高的顯微鏡物鏡分辨率。

高分辨率顯微鏡方格板

高分辨率顯微鏡方格板的總尺寸為 9.0 x 9.0mm²,由 50 x 50µm² 方格組成。方格板適用於測試影像變形及彎曲,以及判定直線及銳利邊緣造成的影像品質。

一般規格

Dimensions (mm):
10 x 10 x 1
Construction:
Stainless Steel, 75 x 25 x 1.5mm, microscope slide format
Pattern Tolerance:
100nm/cm = 10-5
Substrate:
Fused Silica w/Chrome deposit
Optical Density OD (Average):
OD>7 @ 400nm, 6 @ 550nm, 4.5 @ 750nm, 3.6 @ 1000nm
Spectral Range:
200 - 2000nm

產品概覽

High Res Microscopy USAF Target
High Res Microscopy USAF Targets easily determine the resolution limit of an objective in transmitted light and consists of 59 line patterns with 7.5 to 3300 lp/mm in horizontal and vertical alignment. This target also features 5 pinholes with diameters between 4.0-0.25μm, which allows for detailed characterization of micro-imaging optics.
High Res Microscopy Star Target
High Res Microscopy Star Targets consist of 5 Siemens stars and show the peculiarity that the tapered segments in the center of the stars are precisely manufactured to a minimum width of 150nm. This target is ideal for the determining the resolution of microscope objectives with very high numerical apertures.
High Res Microscopy Checker Board
High Res Microscopy Checker Board features a total size of 9.0 x 9.0mm² out of 50 x 50µm² squares. The checker board is ideal for testing of image skew and curvature, along with determining image quality due to the straight and sharp edges.
 
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