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Olympus WLI 遠場校正干涉物鏡

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  • 結合高數值孔徑與寬廣視野
  • 熱補償與穩定性功能
  • 適用於 3D 表面量測與輪廓測量

Olympus WLI遠場校正干涉物鏡的先進光學設計結合高數值孔徑與寬廣視野，可在大面積範圍內擷取精細表面細節，以提供清晰視覺效果。 每個物鏡皆具備內建調整環，可補償溫度造成的焦點偏移，即使在不穩定環境條件下也能維持穩定性與一致的量測精度。 這些物鏡設計搭配 180mm 焦距管透鏡使用，並提供 10 – 50X 放大倍率。 Olympus WLI遠場校正干涉物鏡非常適用於 3D 表面量測與輪廓測量應用，包括半導體檢測、精密加工、光學鍍膜評估與微電子特性分析。

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