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100mm Travel, High Vacuum (10-6 Torr) Motorized Linear Stage, Integrated Controller

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Stock #74-700 New 3-5 Days
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NT$234,360
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Qty 1+ NT$234,360 each
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Specifications

概況

Type:
Metric
Encoder:
No
Manual Control/ LED Indicators:
No/Yes
Manufacturer:
Zaber Technologies Inc.
Model Number:
X-LSM100A-SV2T9
Note:
Requires Accessory Kit, #75-301, for operation.
Type of Motor:
2-Phase Stepper

物理和機械特性

Type of Movement:
Linear (X)
Guide System:
Needle Roller Bearing
Stage Size (mm):
224.2 x 152.0
Travel (mm):
101.6
Accuracy (μm):
20
Backlash (μm):
<12
Height (mm):
21.4
Load Capacity (kg):
10
Load Capacity (N):
100
Repeatability (μm):
<3
Speed (mm/s):
0.000029 - 24
Thrust (N):
35
Weight (kg):
0.43

光學特性

Resolution (μm):
0.047

電氣性能

Current (mA):
350
Maximum Operating Current (mA):
350

硬體與介面連接

Type of Drive:
Lead Screw
Power Supply:
24-48 VDC; Power Supply w/US Plug found in accessories kit, #75-301
Computer Interface:
RS-232, USB

材料特性

Vacuum Compatibility:
High vacuum (10-6 Torr)

環境和耐用性因素

Operating Temperature (°C):
0 to +50

Regulatory Compliance

RoHS 2015:
Certificate of Conformance:
Reach 247:

產品概覽

  • 提供低真空(10-3 Torr)和高真空(10-6 Torr)兩種選項
  • 提供360°旋轉、線性、垂直移動平臺以及測角儀選項
  • 透過極少的饋通導線進行控制

Zaber™ 真空相容電動位移臺專為整合至真空系統而設計,提供 10⁻⁶ Torr 高真空型和 10⁻³ Torr 低真空型兩種組態選項。位移臺主體組件經過特殊設計,可以抑制真空腔體內汙染物的氣體逸出,針對高真空環境下的熱管理進行優化設計,而且整套平臺系統透過極少的饋通導線連接至電腦連接埠。Zaber™ 真空相容電動位移臺提供線性、360°旋轉及測角儀組態,可在真空環境中構建完整的六自由度系統。本系列產品非常適用於高真空條件下的製造與加工過程,例如半導體加工或光學鍍膜。

請注意:配件套件 #75-301為本產品必需配件,單獨銷售。

Accessories

Title 比較庫存號碼  價格 Buy
Accessory Kit for Zaber Vacuum Stages #75-301 New NT$6,825
  • 3-5 Days
    ×
T9 Female to M8 Male Cable, 60cm Long #75-302 New NT$11,095
  • 3-5 Days
    ×
 
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